GF100系列EtherCAT质量流量计 | 北京北方大河仪器仪表有限公司-Senseca-DeltaOHM-Lighthouse-HOBO-HK instruments

环境与气象仪器

洁净室仪器

HVAC及工业仪表

型号 GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 / GF125 / GF126，加强了拥有EtherCAT®的速度

特点

每年<满量程的±0.15%的长期零点稳定性
响应稳定时间: 300毫秒 – <1秒
流量可达到300 slpm
全金属密封的流体通路：可选5µ 或 10µ inch Ra的表面粗糙度
抗腐蚀的哈氏合金升温传感器在温度升高时改善了测量的重复性
MultiFloTM 气体和量程的可编程性—一台表，几千种气体和量程的组合，无需把MFC从管路上拆除，也不会影响精度
方便的用户显示和独立的诊断/服务端口可帮助仪表安装，监测和故障排查
GF120 安全传输系统(SDS®)是布鲁克斯的低压降质量流量控制计，用于离子注入和刻蚀工艺的负压安全传输系统的气体传输

型号	GF100	GF101	GF120	GF120XSD	GF120XSD	GF121	GF125	GF126
区别	High Purity	High Purity High Flow Rate	Ultra-High Purity Ultra-Fast Response Time	SDS Gas Delivery	SDS Gas Delivery	Ultra-High Purity High Flow Rate	Ultra-High Purity Ultra-Fast Response Pressure Transient Insensitivity	High Flow Rate
流量范围-满量程容量	3 sccm – 55 slm	55 slm – 300 slm	3 sccm – 55 slm	4 – 25 sccm	>25 sccm – 1 slm	55 slm – 300 slm	3 sccm – 55 slm	55 slm – 300 slm
表面抛光	10µ inch Ra	10µ inch Ra	5µ inch Ra	5µ inch Ra	5µ inch Ra	5µ inch Ra	5µ inch Ra	5µ inch Ra
精度	±1% S.P. > 20-100% ±0.20% F.S. 2-20%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 20-100% ±0.20% F.S. 2-20%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 20-100% ±0.20% F.S. 2-20%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%
重复性	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.
响应时间-常闭	Normally Closed <1 sec	Normally Closed <1 sec	Normally Closed 700 ms	Normally Closed <3 sec	Normally Closed <3 sec	Normally Closed <1 sec	Normally Closed 300ms – <700ms	Normally Closed <1 sec
响应时间-常开	Normally Open <1.5 sec	Normally Open —	Normally Open <1.5 sec	Normally Open —	Normally Open —	Normally Open —	Normally Open <1.5 sec	Normally Open —
多气体多量程	MultiFlo™ Standard	MultiFlo™ Standard	MultiFlo™ Standard	—	—	MultiFlo™ Standard	MultiFlo™ Standard	MultiFlo™ Standard
瞬时压力波动不敏感	—	—	—	—	—	—	±5% S.P. up to 5 psi/sec upstream press. spike	Ability to measure inlet pressure
诊断能力	Status Lights & Alarms	Status Lights & Alarms	Status Lights & Alarms	Status Lights & Alarms	Status Lights & Alarms	Status Lights & Alarms	Status Lights & Alarms	Status Lights & Alarms
数字通讯	EtherCAT	EtherCAT	EtherCAT	EtherCAT	EtherCAT	EtherCAT	EtherCAT	EtherCAT

友情链接：意大利德尔特（Deltaohm）美国Lighthouse粒子计数器美国ONSET公司HOBO记录仪|气象站

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