| 型号 | 5850EM | 5851EM |
| 流量范围-满量程容量 | .06 sccm – 30,000 sccm | 10 – 100 slpm Nitrogen |
| 表面抛光 | 5 Ra internal finish (optional)
Electropolished wetted surfaces (optional) |
Electropolished wetted surfaces (optional)
Enhanced process (5 Ra avg.) internal surface finish(optional) High purity VAR 316L Stainless Steel |
| 精度 | 1% F.S. including linearity
1.5% F.S. including linearity (>20 slpm) |
1 % F.S. including linearity |
| 重复性 | 0.25% Rate | 0.2% Rate |
| 响应时间-常闭 | Normally Closed Valve
<3 sec |
Normally Closed Valve
<3 sec |
| 多气体多量程 | N/A | N/A |
| 瞬时压力波动不敏感 | .008% per psi Nitrogen | 0.03% per psi up to 150 psig |
| 诊断能力 | MFC Health, Network Status | MFC Health, Network Status |
| 模拟通讯 | 4-20 mA
0-5 Vdc |
4-20 mA
0-5 Vdc |
| 数字通讯 | N/A | Profibus
RS485 S-Protocol RS485 L-Protocol DeviceNet™ |
友情链接： 意大利德尔特（Deltaohm） 美国Lighthouse粒子计数器 美国ONSET公司HOBO记录仪|气象站
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